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https://cadipt.mie.utoronto.ca/publications/laser-induced-photothermal-reflectance-investigation-of-silicon-damaged-by-arsenic-ion-implantation-a-temperature-study/
Citation
I.A. Vitkin, C. Christofides and A. Mandelis, "Laser Induced Photothermal Reflectance Investigation of Silicon Damaged by Arsenic Ion Implantation: A Temperature Study", Appl. Phys. Lett. 54 (24), 2392 - 2394, June, 1989.