Laser infrared Photothermal Radiometry of Electronic Solids: Principles and Applications to Industrial Semiconductor Si Wafers

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https://cadipt.mie.utoronto.ca/publications/laser-infrared-photothermal-radiometry-of-electronic-solids-principles-and-applications-to-industrial-semiconductor-si-wafers/

Citation

A. Mandelis and Y. Riopel, "Laser infrared Photothermal Radiometry of Electronic Solids: Principles and Applications to Industrial Semiconductor Si Wafers", J. Vac. Sci. Technol. A 18 (2), 705-708, Mar/Apr 2000.

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