Photothermal Reflectance Investigation of Processed Silicon. I: Room Temperature Study of the Induced Damage and of the Annealing Kinetics of Defects in Ion Implanted Wafers

https://cadipt.mie.utoronto.ca/publications/photothermal-reflectance-investigation-of-processed-silicon-i-room-temperature-study-of-the-induced-damage-and-of-the-annealing-kinetics-of-defects-in-ion-implanted-wafers-2/

C. Christofides, I.A. Vitkin and A. Mandelis, "Photothermal Reflectance Investigation of Processed Silicon. I: Room Temperature Study of the Induced Damage and of the Annealing Kinetics of Defects in Ion Implanted Wafers", J. Appl. Phys. 67 (6), 2815 - 2821, March, 1990