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Common-mode-rejection demodulation lock-in technique for high-resolution characterization of ion implantation in silicon wafers

F. Rabago and A. Mandelis - 2003

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https://cadipt.mie.utoronto.ca/publications/common-mode-rejection-demodulation-lock-in-technique-for-high-resolution-characterization-of-ion-implantation-in-silicon-wafers/

Citation

F. Rabago and A. Mandelis, "Common-mode-rejection demodulation lock-in technique for high-resolution characterization of ion implantation in silicon wafers", Rev. Sci. Instrum. 74 (1), 624 - 627 (January 2003).

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