Contactless non-destructive imaging of doping density and electrical resistivity of semiconductor Si wafers using lock-in carrierography

https://cadipt.mie.utoronto.ca/publications/contactless-non-destructive-imaging-of-doping-density-and-electrical-resistivity-of-semiconductor-si-wafers-using-lock-in-carrierography/

P. Song, A. Melnikov, Q. Sun, A. Mandelis, and J-Y. Liu, “Contactless non-destructive imaging of doping density and electrical resistivity of semiconductor Si wafers using lock-in carrierography”, IOP Semiconductor Science and Technology 33, 12LT01 (6pp) (2018). https://doi.org/10.1088/1361-6641/aae810