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Deep subsurface electronic defect image contrast and resolution amplification in Si wafers using infrared photocarrier radiometry

J. Batista, A. Mandelis, D. Shaughnessy and B. Li - 2003

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https://cadipt.mie.utoronto.ca/publications/deep-subsurface-electronic-defect-image-contrast-and-resolution-amplification-in-si-wafers-using-infrared-photocarrier-radiometry/

Citation

J. Batista, A. Mandelis, D. Shaughnessy and B. Li, "Deep subsurface electronic defect image contrast and resolution amplification in Si wafers using infrared photocarrier radiometry", Appl. Phys. Lett. 85 (10), 1713 - 1715 (6 Sept. 2004).

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