Permalink to Publication
https://cadipt.mie.utoronto.ca/publications/electronic-defect-and-contamination-monitoring-in-si-wafers-using-spectrally-integrated-room-temperature-photo-carrier-radiometry/
Citation
D. Shaughnessy and A. Mandelis, "Electronic Defect and Contamination Monitoring in Si Wafers Using Spectrally Integrated Room-Temperature Photo-Carrier Radiometry", J. Electrochem. Soc. 153 (4) G283 – G290 (2006).