High Frequency Differential Piezoelectric Photoacoustic Investigation of Ion Implanted (100) Silicon Wafers via Laser Beam Position Modulation

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Citation

J. Zuccon and A. Mandelis, "High Frequency Differential Piezoelectric Photoacoustic Investigation of Ion Implanted (100) Silicon Wafers via Laser Beam Position Modulation", IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control, UFFC 35, 5 - 13, January, 1988.

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