Noncontact Carrier Lifetime Depth-Profiling of Ion-Implanted Si Using Photothermal Radiometry

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https://cadipt.mie.utoronto.ca/publications/noncontact-carrier-lifetime-depth-profiling-of-ion-implanted-si-using-photothermal-radiometry/

Citation

A. Othonos, A. Salnick, A. Mandelis and C. Christofides, "Noncontact Carrier Lifetime Depth-Profiling of Ion-Implanted Si Using Photothermal Radiometry", Phys. Stat. Solidi (a) Rapid Research Note 161, R13-R14, 1997.

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