Noncontacting Photothermal Radiometry of SiO2/Si MOS Capacitor Structures

Permalink to Publication

https://cadipt.mie.utoronto.ca/publications/noncontacting-photothermal-radiometry-of-sio2si-mos-capacitor-structures-3/

Citation

A. Salnick, C. Jean and A. Mandelis, "Noncontacting Photothermal Radiometry of SiO2/Si MOS Capacitor Structures", Solid State Electron 41 (4), 591-597 (1997).

PDF

View and Download