Photothermal Radiometric Investigation of Implanted Silicon: The Influence of Dose and Thermal Annealing

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https://cadipt.mie.utoronto.ca/publications/photothermal-radiometric-investigation-of-implanted-silicon-the-influence-of-dose-and-thermal-annealing/

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A. Othonos, C. Christofides and A. Mandelis, "Photothermal Radiometric Investigation of Implanted Silicon: The Influence of Dose and Thermal Annealing", Appl. Phys. Lett. 69 (6), 821-823, August 5, 1996.

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