Remote Quantitative Temperature and Thickness Measurements of Plasma-deposited Titanium Nitride Thin Coatings on Steel using a Laser Interferometric Thermoreflectance Optical Thermometer

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Yue Liu, Andreas Mandelis, Mervyn Choy, Chinhua Wang and Lee Segal, "Remote Quantitative Temperature and Thickness Measurements of Plasma-deposited Titanium Nitride Thin Coatings on Steel using a Laser Interferometric Thermoreflectance Optical Thermometer", Rev. Sci. Instrum. 76, 084902 (1 - 11), (August 2005).

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