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Three-Layer Photo-Carrier Radiometry Model of Ion-Implanted Silicon Wafers

B. Li, D. Shaughnessy, A. Mandelis, J. Batista and J. Garcia - 2004

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https://cadipt.mie.utoronto.ca/publications/three-layer-photo-carrier-radiometry-model-of-ion-implanted-silicon-wafers/

Citation

B. Li, D. Shaughnessy, A. Mandelis, J. Batista and J. Garcia, "Three-Layer Photo-Carrier Radiometry Model of Ion-Implanted Silicon Wafers", J. Appl. Phys. 95 (12), 7832 - 7840 (15 June 2004).

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