Accuracy of photo-carrier radiometric measurements of electronic transport properties of ion-implanted silicon wafers

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Citation

B. Li, D. Shaughnessy, A. Mandelis, J. Batista and J. Garcia, "Accuracy of photo-carrier radiometric measurements of electronic transport properties of ion-implanted silicon wafers", J. Appl. Phys. 96 (1), 186 - 196 (1 July 2004).

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