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Monitoring of ion Implantation in Si with Carrier Plasma Waves Using Infrared Photothermal Radiometry

A. Salnick, A. Mandelis, F. Funak and C. Jean - 1997

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https://cadipt.mie.utoronto.ca/publications/monitoring-of-ion-implantation-in-si-with-carrier-plasma-waves-using-infrared-photothermal-radiometry/

Citation

A. Salnick, A. Mandelis, F. Funak and C. Jean, "Monitoring of ion Implantation in Si with Carrier Plasma Waves Using Infrared Photothermal Radiometry", Appl. Phys. Lett. 71, No. 11, 1531-1533, September 1997.

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